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18
| Item |
OEM P/N |
Part Mame |
Equipment |
| 1 |
0020-10117 |
Plate,Perf, OX 200mm TEOS |
AMAT |
| 2 |
0020-10122 |
Plate Perf 125mm Oxide |
AMAT |
| 3 |
0020-10123 |
Plate, Perf Narrow, Nitride 200mm |
AMAT |
| 4 |
0020-10771 |
Plate, Perf, 150mm OX |
AMAT |
| 5 |
0020-30086 |
Plate, Perf, GIANT GAP Nitride |
AMAT |
| 6 |
0020-31488 |
Gas Distribution Plate, 13 Hole |
AMAT |
| 7 |
0020-31492 |
Gas Distribution Plate, 101 Hole |
AMAT |
| 8 |
0020-34445 |
Plate, Blocker, DxZ |
AMAT |
| 9 |
0020-42284 |
Plate 6" Blocker, EC WxZ |
AMAT |
| 10 |
0020-42286 |
Plate Perf 6", EC WxZ |
AMAT |
| 11 |
0020-44453 |
Blocker TEOS, 300SE, 300mm Producer |
AMAT |
| 12 |
0020-48972 |
Face Plate, LowK, XTRA Row Extending, 300mm Producer SE |
AMAT |
| 13 |
0020-51923 |
FacePlate, Silane NIT, 300mm Producer |
AMAT |
| 14 |
0020-62625 |
FacePlate, BLOK, Low K, PPC MFG+LSA CP, 300mm Producer SE |
AMAT |
| 15 |
0021-00041 |
Face Plate, SiN XG, DxZ DCVD |
AMAT |
| 16 |
0021-00042 |
Face Plate, TEOS DxZ DCVD |
AMAT |
| 17 |
0021-01569 |
Blocker Plate, He/N2 GIGA-Fill SACVD |
AMAT |
| 18 |
0021-01572 |
Face Plate, GIGA-Fill SACVD BPSG CENT 23 |
AMAT |
| 19 |
0021-01598 |
Face Plate, Nickel, Ti-xZ |
AMAT |
| 20 |
0021-03637 |
Face Plate, Silane Producer 200mm |
AMAT |
| 21 |
0021-15200 |
FacePlate, BLOK & Hardmask 200mm Producer |
AMAT |
| 22 |
0021-35087 |
Plate, Blocker N2-Carrier (EH) |
AMAT |
| 23 |
0040-95475 |
Face Plate, ZDK90, HIGHDEPRATE, TEOS |
AMAT |
| 24 |
0021-38119 |
Face Plate, DxZ, DCVD, Center Hole |
AMAT |
| 25 |
70055-00907E |
Shower Plate |
ASM |
| 26 |
70055-00817E |
Shower Plate |
ASM |
| 27 |
70055-70983 |
Shower Plate |
ASM |
| 28 |
73055-01626A |
Shower Plate 12" |
ASM |
|
